Abstract:
:Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr0.53Ti0.47)O3 (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG).
journal_name
Sci Repjournal_title
Scientific reportsauthors
Luo Y,Qu T,Cui Y,Pan Y,Yu M,Luo H,Jia Y,Tan Z,Liu J,Zhang Bdoi
10.1038/s41598-019-45180-5subject
Has Abstractpub_date
2019-07-01 00:00:00pages
9461issue
1issn
2045-2322pii
10.1038/s41598-019-45180-5journal_volume
9pub_type
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