Abstract:
:Polycrystalline silicon (poly-Si) micromechanical structures can be made by selectively etching an underlying sacrificial oxide layer. Advantages of this micromachining technique are its simplicity and compatibility with conventional integrated-circuit processing. Compressive internal stress in poly-Si films constrains the dimensions of microstructures; fortunately, it can be reduced through annealing. Fabrication of an integrated vapor sensor incorporating a resonant poly-Si microbridge and on-chip NMOS circuitry is described. Frequency response measurements imply that poly-Si films have a Young's modulus of 4 X 10(10) Nm-2, substantially lower than crystalline silicon. A potential application of poly-Si micromachining is fabrication of an integrated pressure transducer; evaluation of this device identifies areas for further research.
journal_name
Ann Biomed Engjournal_title
Annals of biomedical engineeringauthors
Howe RTdoi
10.1007/BF02584269subject
Has Abstractpub_date
1986-01-01 00:00:00pages
187-97issue
2eissn
0090-6964issn
1573-9686journal_volume
14pub_type
杂志文章abstract::A progressive reduction in muscle fiber conduction velocity is typically observed during fatiguing muscle contraction. Although the exact causes of the conduction velocity decrease have not yet been fully established, increasing evidence suggests that changes in extracellular potassium concentration may be largely res...
journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1007/s10439-009-9756-4
更新日期:2009-10-01 00:00:00
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
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更新日期:2018-09-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1023/b:abme.0000017553.01798.12
更新日期:2004-03-01 00:00:00
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1023/b:abme.0000032455.78459.56
更新日期:2004-07-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章,评审
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1007/BF02367607
更新日期:1993-03-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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journal_title:Annals of biomedical engineering
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doi:10.1007/s10439-013-0749-y
更新日期:2013-07-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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更新日期:2011-05-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1007/s10439-013-0781-y
更新日期:2013-09-01 00:00:00
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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更新日期:2011-08-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1114/1.219
更新日期:1999-03-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
doi:10.1007/BF02368460
更新日期:1991-01-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章,评审
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更新日期:2015-03-01 00:00:00
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journal_title:Annals of biomedical engineering
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更新日期:2009-05-01 00:00:00
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journal_title:Annals of biomedical engineering
pub_type: 杂志文章
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更新日期:2005-03-01 00:00:00