Polycrystalline silicon micromachining: a new technology for integrated sensors.

Abstract:

:Polycrystalline silicon (poly-Si) micromechanical structures can be made by selectively etching an underlying sacrificial oxide layer. Advantages of this micromachining technique are its simplicity and compatibility with conventional integrated-circuit processing. Compressive internal stress in poly-Si films constrains the dimensions of microstructures; fortunately, it can be reduced through annealing. Fabrication of an integrated vapor sensor incorporating a resonant poly-Si microbridge and on-chip NMOS circuitry is described. Frequency response measurements imply that poly-Si films have a Young's modulus of 4 X 10(10) Nm-2, substantially lower than crystalline silicon. A potential application of poly-Si micromachining is fabrication of an integrated pressure transducer; evaluation of this device identifies areas for further research.

journal_name

Ann Biomed Eng

authors

Howe RT

doi

10.1007/BF02584269

subject

Has Abstract

pub_date

1986-01-01 00:00:00

pages

187-97

issue

2

eissn

0090-6964

issn

1573-9686

journal_volume

14

pub_type

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