Abstract：
:P-type doping in high Al-content AlGaN alloys is a main challenge for realizing AlGaN-based deep ultraviolet optoelectronics devices. According to the first-principles calculations, Mg activation energy may be reduced so that a high hole concentration can be obtained by introducing nanoscale (AlN)5/(GaN)1 superlattice (SL) in Al0.83Ga0.17N disorder alloy. In this work, experimental evidences were achieved by analyzing Mg doped high Al-content AlGaN alloys and Mg doped AlGaN SLs as well as MgGa δ doped AlGaN SLs. Mg acceptor activation energy was significantly reduced from 0.378 to 0.331 eV by using MgGa δ doping in SLs instead of traditional doping in alloys. This new process was confirmed to be able to realize high p-type doping in high Al-content AlGaN.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Wang X,Wang W,Wang J,Wu H,Liu Cdoi
10.1038/srep44223subject
Has Abstractpub_date
2017-03-14 00:00:00pages
44223issn
2045-2322pii
srep44223journal_volume
7pub_type
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