Abstract:
:In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.
journal_name
Ultrasonicsjournal_title
Ultrasonicsauthors
Kanda T,Kurosawa MK,Higuchi Tdoi
10.1016/s0041-624x(02)00091-4subject
Has Abstractpub_date
2002-05-01 00:00:00pages
61-5issue
1-8eissn
0041-624Xissn
1874-9968pii
S0041-624X(02)00091-4journal_volume
40pub_type
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