Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator.

Abstract:

:In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

journal_name

Ultrasonics

journal_title

Ultrasonics

authors

Kanda T,Kurosawa MK,Higuchi T

doi

10.1016/s0041-624x(02)00091-4

subject

Has Abstract

pub_date

2002-05-01 00:00:00

pages

61-5

issue

1-8

eissn

0041-624X

issn

1874-9968

pii

S0041-624X(02)00091-4

journal_volume

40

pub_type

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