Abstract:
:The variation in energy bandgaps of amorphous oxide semiconducting SiZnSnO (a-SZTO) has been investigated by controlling the oxygen partial pressure (Op). The systematic change in Op during deposition has been used to control the electrical characteristics and energy bandgap of a-SZTO. As Op increased, the electrical properties degraded, while the energy bandgap increased systematically. This is mainly due to the change in the oxygen vacancy inside the a-SZTO thin film by controlling Op. Changes in oxygen vacancies have been observed by using X-ray photoelectron spectroscopy (XPS) and investigated by analyzing the variation in density of states (DOS) inside the energy bandgaps. In addition, energy bandgap parameters, such as valence band level, Fermi level, and energy bandgap, were extracted by using ultraviolet photoelectron spectroscopy, Kelvin probe force microscopy, and high-resolution electron energy loss spectroscopy. As a result, it was confirmed that the difference between the conduction band minimum and the Fermi level in the energy bandgap increased systematically as Op increases. This shows good agreement with the measured results of XPS and DOS analyses.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Lee BH,Cho KS,Lee DY,Sohn A,Lee JY,Choo H,Park S,Kim SW,Kim S,Lee SYdoi
10.1038/s41598-019-55807-2subject
Has Abstractpub_date
2019-12-17 00:00:00pages
19246issue
1issn
2045-2322pii
10.1038/s41598-019-55807-2journal_volume
9pub_type
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