Abstract:
:Remarkable improvements in both structural and optical properties of wafer-scale hexagonal boron nitride (h-BN) films grown by metal-organic chemical vapor deposition (MOCVD) enabled by high-temperature post-growth annealing is presented. The enhanced crystallinity and homogeneity of the MOCVD-grown h-BN films grown at 1050 °C is attributed to the solid-state atomic rearrangement during the thermal annealing at 1600 °C. In addition, the appearance of the photoluminescence by excitonic transitions as well as enlarged optical band gap were observed for the post-annealed h-BN films as direct consequences of the microstructural improvement. The post-growth annealing is a very promising strategy to overcome limited crystallinity of h-BN films grown by typical MOCVD systems while maintaining their advantage of multiple wafer scalability for practical applications towards two-dimensional electronics and optoelectronics.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Lee SH,Jeong H,Okello OFN,Xiao S,Moon S,Kim DY,Kim GY,Lo JI,Peng YC,Cheng BM,Miyake H,Choi SY,Kim JKdoi
10.1038/s41598-019-47093-9subject
Has Abstractpub_date
2019-07-22 00:00:00pages
10590issue
1issn
2045-2322pii
10.1038/s41598-019-47093-9journal_volume
9pub_type
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