Self-assembled single-crystal silicon circuits on plastic.

Abstract:

:We demonstrate the use of self-assembly for the integration of freestanding micrometer-scale components, including single-crystal, silicon field-effect transistors (FETs) and diffusion resistors, onto flexible plastic substrates. Preferential self-assembly of multiple microcomponent types onto a common platform is achieved through complementary shape recognition and aided by capillary, fluidic, and gravitational forces. We outline a microfabrication process that yields single-crystal, silicon FETs in a freestanding, powder-like collection for use with self-assembly. Demonstrations of self-assembled FETs on plastic include logic inverters and measured electron mobility of 592 cm2/V-s. Finally, we extend the self-assembly process to substrates each containing 10,000 binding sites and realize 97% self-assembly yield within 25 min for 100-microm-sized elements. High-yield self-assembly of micrometer-scale functional devices as outlined here provides a powerful approach for production of macroelectronic systems.

authors

Stauth SA,Parviz BA

doi

10.1073/pnas.0602893103

subject

Has Abstract

pub_date

2006-09-19 00:00:00

pages

13922-7

issue

38

eissn

0027-8424

issn

1091-6490

pii

0602893103

journal_volume

103

pub_type

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