Structural and Functional Properties of the Thin Film System Ti-Ni-Si.

Abstract:

:The thin film system Ti-Ni-Si was investigated using methods of combinatorial materials science. A thin film composition spread library of the system was fabricated using combinatorial magnetron sputtering. The functional properties Seebeck coefficient, electrical resistivity, and luminance were determined using high-throughput characterization techniques. A thin-film phase diagram was established by the assessment of high-throughput X-ray diffraction results. Correlations between composition, phase constitution, and functional properties with focus on the binary composition space are discussed.

journal_name

ACS Comb Sci

authors

Wambach M,Ziolkowski P,Müller E,Ludwig A

doi

10.1021/acscombsci.8b00181

subject

Has Abstract

pub_date

2019-05-13 00:00:00

pages

362-369

issue

5

eissn

2156-8952

issn

2156-8944

journal_volume

21

pub_type

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