Abstract:
:A microgradient-heater (MGH) was developed, and its feasibility as a tool for high-throughput materials science experimentation was tested. The MGH is derived from microhot plate (MHP) systems and allows combinatorial thermal processing on the micronano scale. The temperature gradient is adjustable by the substrate material. For an Au-coated MGH membrane a temperature drop from 605 to 100 °C was measured over a distance of 965 μm, resulting in an average temperature change of 0.52 K/μm. As a proof of principle, we demonstrate the feasibility of MGHs on the example of a chemical vapor deposition (CVD) process. The achieved results show discontinuous changes in surface morphology within a continuous TiO2 film. Furthermore the MGH can be used to get insights into the energetic relations of film growth processes, giving it the potential for microcalorimetry measurements.
journal_name
ACS Comb Scijournal_title
ACS combinatorial scienceauthors
Meyer R,Hamann S,Ehmann M,Thienhaus S,Jaeger S,Thiede T,Devi A,Fischer RA,Ludwig Adoi
10.1021/co3000488subject
Has Abstractpub_date
2012-10-08 00:00:00pages
531-6issue
10eissn
2156-8952issn
2156-8944journal_volume
14pub_type
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journal_title:ACS combinatorial science
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journal_title:ACS combinatorial science
pub_type: 杂志文章
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journal_title:ACS combinatorial science
pub_type: 杂志文章
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pub_type: 历史文章,杂志文章,评审
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journal_title:ACS combinatorial science
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journal_title:ACS combinatorial science
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doi:10.1021/co500047w
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journal_title:ACS combinatorial science
pub_type: 杂志文章
doi:10.1021/acscombsci.8b00084
更新日期:2018-10-08 00:00:00
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journal_title:ACS combinatorial science
pub_type: 杂志文章
doi:10.1021/co100034v
更新日期:2011-01-10 00:00:00
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pub_type: 杂志文章
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更新日期:2014-05-12 00:00:00
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journal_title:ACS combinatorial science
pub_type: 信件
doi:10.1021/co200165j
更新日期:2012-04-09 00:00:00
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journal_title:ACS combinatorial science
pub_type: 杂志文章
doi:10.1021/co500181b
更新日期:2015-04-13 00:00:00
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pub_type: 杂志文章
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更新日期:2016-05-09 00:00:00
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