Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam.

Abstract:

:Recent progress in nanotechnology enables the production of atomically abrupt interfaces in multilayered junctions, allowing for an increase in the number of transistors in a processor. However, uniform electron transport has not yet been achieved across the entire interfacial area in junctions due to the existence of local defects, causing local heating and reduction in transport efficiency. To date, junction uniformity has been predominantly assessed by cross-sectional transmission electron microscopy, which requires slicing and milling processes that can potentially introduce additional damage and deformation. It is therefore essential to develop an alternative non-destructive method. Here we show a non-destructive technique using scanning electron microscopy to map buried junction properties. By controlling the electron-beam energy, we demonstrate the contrast imaging of local junction resistances at a controlled depth. This technique can be applied to any buried junctions, from conventional semiconductor and metal devices to organic devices.

journal_name

Nat Commun

journal_title

Nature communications

authors

Hirohata A,Yamamoto Y,Murphy BA,Vick AJ

doi

10.1038/ncomms12701

subject

Has Abstract

pub_date

2016-09-02 00:00:00

pages

12701

issn

2041-1723

pii

ncomms12701

journal_volume

7

pub_type

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