Fast growth of large-grain and continuous MoS2 films through a self-capping vapor-liquid-solid method.

Abstract:

:Most chemical vapor deposition methods for transition metal dichalcogenides use an extremely small amount of precursor to render large single-crystal flakes, which usually causes low coverage of the materials on the substrate. In this study, a self-capping vapor-liquid-solid reaction is proposed to fabricate large-grain, continuous MoS2 films. An intermediate liquid phase-Na2Mo2O7 is formed through a eutectic reaction of MoO3 and NaF, followed by being sulfurized into MoS2. The as-formed MoS2 seeds function as a capping layer that reduces the nucleation density and promotes lateral growth. By tuning the driving force of the reaction, large mono/bilayer (1.1 mm/200 μm) flakes or full-coverage films (with a record-high average grain size of 450 μm) can be grown on centimeter-scale substrates. The field-effect transistors fabricated from the full-coverage films show high mobility (33 and 49 cm2 V-1 s-1 for the mono and bilayer regions) and on/off ratio (1 ~ 5 × 108) across a 1.5 cm × 1.5 cm region.

journal_name

Nat Commun

journal_title

Nature communications

authors

Chang MC,Ho PH,Tseng MF,Lin FY,Hou CH,Lin IK,Wang H,Huang PP,Chiang CH,Yang YC,Wang IT,Du HY,Wen CY,Shyue JJ,Chen CW,Chen KH,Chiu PW,Chen LC

doi

10.1038/s41467-020-17517-6

subject

Has Abstract

pub_date

2020-07-23 00:00:00

pages

3682

issue

1

issn

2041-1723

pii

10.1038/s41467-020-17517-6

journal_volume

11

pub_type

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