Abstract：
:Ultrathin ferroelectric materials could potentially enable low-power perovskite ferroelectric tetragonality logic and nonvolatile memories1,2. As ferroelectric materials are made thinner, however, the ferroelectricity is usually suppressed. Size effects in ferroelectrics have been thoroughly investigated in perovskite oxides-the archetypal ferroelectric system3. Perovskites, however, have so far proved unsuitable for thickness scaling and integration with modern semiconductor processes4. Here we report ferroelectricity in ultrathin doped hafnium oxide (HfO2), a fluorite-structure oxide grown by atomic layer deposition on silicon. We demonstrate the persistence of inversion symmetry breaking and spontaneous, switchable polarization down to a thickness of one nanometre. Our results indicate not only the absence of a ferroelectric critical thickness but also enhanced polar distortions as film thickness is reduced, unlike in perovskite ferroelectrics. This approach to enhancing ferroelectricity in ultrathin layers could provide a route towards polarization-driven memories and ferroelectric-based advanced transistors. This work shifts the search for the fundamental limits of ferroelectricity to simpler transition-metal oxide systems-that is, from perovskite-derived complex oxides to fluorite-structure binary oxides-in which 'reverse' size effects counterintuitively stabilize polar symmetry in the ultrathin regime.
journal_name
Naturejournal_title
Natureauthors
Cheema SS,Kwon D,Shanker N,Dos Reis R,Hsu SL,Xiao J,Zhang H,Wagner R,Datar A,McCarter MR,Serrao CR,Yadav AK,Karbasian G,Hsu CH,Tan AJ,Wang LC,Thakare V,Zhang X,Mehta A,Karapetrova E,Chopdekar RV,Shafer P,Arenhdoi
10.1038/s41586-020-2208-xsubject
Has Abstractpub_date
2020-04-01 00:00:00pages
478-482issue
7804eissn
0028-0836issn
1476-4687pii
10.1038/s41586-020-2208-xjournal_volume
580pub_type
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