Abstract:
:We identify a new instability in electrostatic actuators dubbed quasi-static pull-in. We report experimental evidence of the instability and study its characteristics in two types of micro actuators operating in ambient air. We found that the underlying mechanism is a fast-slow dynamic interaction between slowly-varying electrostatic excitation and fast resonator response that instigate large non-resonant oscillatory orbits and eventually disappears in a global Shilnikov bifurcation. Based on these findings, we formulate and present a new taxonomy of pull-in instabilities in electrostatic actuators.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Al-Ghamdi MS,Khater ME,Abdel-Rahman EM,Nepomuceno EGdoi
10.1038/s41598-020-61534-wsubject
Has Abstractpub_date
2020-03-19 00:00:00pages
4990issue
1issn
2045-2322pii
10.1038/s41598-020-61534-wjournal_volume
10pub_type
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