Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature.

Abstract:

:We report on the degradation process by water vapor of hydrogenated amorphous silicon oxynitride (SiON:H) films deposited by plasma-enhanced chemical vapor deposition at low temperature. The stability of the films was investigated as a function of the oxygen content and deposition temperature. Degradation by defects such as pinholes was not observed with transmission electron microscopy. However, we observed that SiON:H film degrades by reacting with water vapor through only interstitial paths and nano-defects. To monitor the degradation process, the atomic composition, mass density, and fully oxidized thickness were measured by using high-resolution Rutherford backscattering spectroscopy and X-ray reflectometry. The film rapidly degraded above an oxygen composition of ~27 at%, below a deposition temperature of ~150 °C, and below an mass density of ~2.15 g/cm3. This trend can be explained by the extents of porosity and percolation channel based on the ring model of the network structure. In the case of a high oxygen composition or low temperature, the SiON:H film becomes more porous because the film consists of network channels of rings with a low energy barrier.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Lee HI,Park JB,Xianyu W,Kim K,Chung JG,Kyoung YK,Byun S,Yang WY,Park YY,Kim SM,Cho E,Shin JK

doi

10.1038/s41598-017-14291-2

subject

Has Abstract

pub_date

2017-10-26 00:00:00

pages

14146

issue

1

issn

2045-2322

pii

10.1038/s41598-017-14291-2

journal_volume

7

pub_type

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