Abstract：
:The design of a novel, single-axis ultrasonic actuating stage has been proposed. It consists of a movable plate, an edge-driving ultrasonic actuator as an actuating device, and a magnetic Magi encoder as a position sensor. The stage is impelled using a friction-contact mechanism by the ultrasonic actuator with long distance movement. Very high actuating and braking abilities are obtained. The stable and precise positioning control of the stage was achieved by using a neural-fuzzy controller. This simple and inexpensive structure of the single-axis stage demonstrates that the mechanical design of ultrasonic actuating concept could be done flexibly according to the requirements for various applications.
journal_name
Ultrasonicsjournal_title
Ultrasonicsauthors
Wen F,Yen CYdoi
10.1016/j.ultras.2007.06.005subject
Has Abstractpub_date
2007-12-01 00:00:00pages
23-31issue
1-4eissn
0041-624Xissn
1874-9968pii
S0041-624X(07)00062-5journal_volume
47pub_type
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