A plasma-treated chalcogenide switch device for stackable scalable 3D nanoscale memory.

Abstract:

:Stackable select devices such as the oxide p-n junction diode and the Schottky diode (one-way switch) have been proposed for non-volatile unipolar resistive switching devices; however, bidirectional select devices (or two-way switch) need to be developed for bipolar resistive switching devices. Here we report on a fully stackable switching device that solves several problems including current density, temperature stability, cycling endurance and cycle distribution. We demonstrate that the threshold switching device based on As-Ge-Te-Si material significantly improves cycling endurance performance by reactive nitrogen deposition and nitrogen plasma hardening. Formation of the thin Si₃N₄ glass layer by the plasma treatment retards tellurium diffusion during cycling. Scalability of threshold switching devices is measured down to 30 nm scale with extremely fast switching speed of ~2 ns.

journal_name

Nat Commun

journal_title

Nature communications

authors

Lee MJ,Lee D,Cho SH,Hur JH,Lee SM,Seo DH,Kim DS,Yang MS,Lee S,Hwang E,Uddin MR,Kim H,Chung UI,Park Y,Yoo IK

doi

10.1038/ncomms3629

subject

Has Abstract

pub_date

2013-01-01 00:00:00

pages

2629

issn

2041-1723

pii

ncomms3629

journal_volume

4

pub_type

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