Semiconductor manufacturing: an introduction to processes and hazards.

Abstract:

:Recent studies suggest that semiconductor workers have an increased incidence of work-related illness. Semiconductor manufacturing is a chemically intensive industry involving many potentially hazardous operations. As this industry moves into new geographic areas, health care professionals will be asked to evaluate medical or workplace conditions associated with unfamiliar and complex production processes. This paper provides an overview of semiconductor manufacturing processes for these health practitioners. Each step of device fabrication is detailed with its attendant chemical and physical hazards. Broader concepts of industrial control technology, clean room ventilation, and ergonomics are explained. The hazards are tabulated to allow rapid assessment of the risks inherent to each processing step. References have been chosen to guide the reader to more indepth information.

journal_name

Am J Ind Med

authors

Wald PH,Jones JR

doi

10.1002/ajim.4700110209

subject

Has Abstract

pub_date

1987-01-01 00:00:00

pages

203-21

issue

2

eissn

0271-3586

issn

1097-0274

journal_volume

11

pub_type

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