Abstract：
:A method for defect characterization is presented that allows to measure the activation energy, capture cross-section, and defect density in dielectric materials. This is exemplarily performed on aluminum oxide thin films deposited on hydrogen-terminated diamond. During the measurement, samples were illuminated using a 405 nm laser, charging the defects while simultaneously measuring the surface conductivity of the diamond at different temperatures. By applying the standard boxcar evaluation known from deep-level transient spectroscopy, we found five different defect levels in [Formula: see text]. One can be identified as substitutional silicon in aluminum oxide, while the others are most likely connected to either aluminum interstitials or carbon and nitrogen impurities.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Oing D,Geller M,Stahl L,Kerski J,Lorke A,Wöhrl Ndoi
10.1038/s41598-020-69240-3subject
Has Abstractpub_date
2020-07-27 00:00:00pages
12533issue
1issn
2045-2322pii
10.1038/s41598-020-69240-3journal_volume
10pub_type
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更新日期：2016-03-14 00:00:00
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pub_type： 杂志文章,随机对照试验
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