Abstract:
:The flexible conductive-bridging random access memory (CBRAM) device using a Cu/TiW/Ga2O3/Pt stack is fabricated on polyimide substrate with low thermal budget process. The CBRAM devices exhibit good memory-resistance characteristics, such as good memory window (>105), low operation voltage, high endurance (>1.4 × 102 cycles), and large retention memory window (>105). The temperature coefficient of resistance in the filament confirms that the conduction mechanism observed in the Ga2O3 layer is similar with the phenomenon of electrochemical metallization (ECM). Moreover, the performance of CBRAM device will not be impacted during the flexibility test. Considering the excellent performance of the CBRAM device fabricated by low-temperature process, it may provide a promising potential for the applications of flexible integrated electronic circuits.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Gan KJ,Liu PT,Chien TC,Ruan DB,Sze SMdoi
10.1038/s41598-019-50816-7subject
Has Abstractpub_date
2019-10-02 00:00:00pages
14141issue
1issn
2045-2322pii
10.1038/s41598-019-50816-7journal_volume
9pub_type
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