Performance improvement of miniaturized ZnO nanowire accelerometer fabricated by refresh hydrothermal synthesis.

Abstract:

:Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the accelerometer, and copper was chosen as a head mass. Seedless and refresh hydrothermal synthesis methods were conducted to grow ZnO nanowires on the copper substrate and the effect of ZnO nanowire length on the accelerometer performance was investigated. The refresh hydrothermal synthesis exhibits longer ZnO nanowires, 12 µm, than the seedless hydrothermal synthesis, 6 µm. Performance of the fabricated accelerometers was verified by comparing with a commercial accelerometer. The sensitivity of the fabricated accelerometer by the refresh hydrothermal synthesis is shown to be 37.7 pA g-1, which is about 30 times larger than the previous result.

journal_name

R Soc Open Sci

authors

Song S,Kim HC,Kim JW,Kim D,Kim J

doi

10.1098/rsos.170557

subject

Has Abstract

pub_date

2017-09-13 00:00:00

pages

170557

issue

9

issn

2054-5703

pii

rsos170557

journal_volume

4

pub_type

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