Abstract:
:Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the accelerometer, and copper was chosen as a head mass. Seedless and refresh hydrothermal synthesis methods were conducted to grow ZnO nanowires on the copper substrate and the effect of ZnO nanowire length on the accelerometer performance was investigated. The refresh hydrothermal synthesis exhibits longer ZnO nanowires, 12 µm, than the seedless hydrothermal synthesis, 6 µm. Performance of the fabricated accelerometers was verified by comparing with a commercial accelerometer. The sensitivity of the fabricated accelerometer by the refresh hydrothermal synthesis is shown to be 37.7 pA g-1, which is about 30 times larger than the previous result.
journal_name
R Soc Open Scijournal_title
Royal Society open scienceauthors
Song S,Kim HC,Kim JW,Kim D,Kim Jdoi
10.1098/rsos.170557subject
Has Abstractpub_date
2017-09-13 00:00:00pages
170557issue
9issn
2054-5703pii
rsos170557journal_volume
4pub_type
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