Determination of conditions for optimum resolution of a high angle thin window energy dispersive spectrometer.

Abstract:

:The energy resolution of an energy dispersive spectrometer (EDS) equipped with an ultrathin window (UTW) and mounted at a high take-off angle (72 degrees) on a transmission electron microscope has been studied under a variety of operating conditions. The spectrometer resolution is close to that specified by the manufacturer, up to count rates of 400 cps. Above 400 cps the resolution deteriorates rapidly, and the MCA dead time and zero width increase. Above 10 keV, the height of the background is much greater than expected for bremsstrahlung and shows the shape which has previously been attributed to backscattered electron flux into the detector. It is postulated that the deterioration in resolution with count rate is caused by backscattered electrons reaching the detector through the UTW.

journal_name

Microsc Res Tech

authors

Blackford MG,Smith KL

doi

10.1002/jemt.1070220208

keywords:

subject

Has Abstract

pub_date

1992-07-01 00:00:00

pages

194-8

issue

2

eissn

1059-910X

issn

1097-0029

journal_volume

22

pub_type

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