Abstract:
:The energy resolution of an energy dispersive spectrometer (EDS) equipped with an ultrathin window (UTW) and mounted at a high take-off angle (72 degrees) on a transmission electron microscope has been studied under a variety of operating conditions. The spectrometer resolution is close to that specified by the manufacturer, up to count rates of 400 cps. Above 400 cps the resolution deteriorates rapidly, and the MCA dead time and zero width increase. Above 10 keV, the height of the background is much greater than expected for bremsstrahlung and shows the shape which has previously been attributed to backscattered electron flux into the detector. It is postulated that the deterioration in resolution with count rate is caused by backscattered electrons reaching the detector through the UTW.
journal_name
Microsc Res Techjournal_title
Microscopy research and techniqueauthors
Blackford MG,Smith KLdoi
10.1002/jemt.1070220208keywords:
subject
Has Abstractpub_date
1992-07-01 00:00:00pages
194-8issue
2eissn
1059-910Xissn
1097-0029journal_volume
22pub_type
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