Abstract:
:An approximate formula has been developed to determine the electromechanical coupling coefficient of the piezoelectric film in a four-layer composite resonator, which includes two electrodes. In this formula, the coupling coefficient can be calculated from the distribution of the effective coupling coefficients, k2eff, which are given by the modal frequency spectrum of the composite resonator. The feasibility of this method has been demonstrated with a ZnO/SiO2 composite resonator for different electrode thickness. The effect of mechanical propagation loss in both piezoelectric layer and substrate has also been studied.
journal_name
Ultrasonicsjournal_title
Ultrasonicsauthors
Zhang Y,Wang Z,Cheeke JDdoi
10.1016/s0041-624x(99)00172-9subject
Has Abstractpub_date
2000-03-01 00:00:00pages
114-7issue
1-8eissn
0041-624Xissn
1874-9968pii
S0041-624X(99)00172-9journal_volume
38pub_type
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