Simulation of electromechanical coupling coefficient by modified modal frequency spectrum method including the electrode effect

Abstract:

:An approximate formula has been developed to determine the electromechanical coupling coefficient of the piezoelectric film in a four-layer composite resonator, which includes two electrodes. In this formula, the coupling coefficient can be calculated from the distribution of the effective coupling coefficients, k2eff, which are given by the modal frequency spectrum of the composite resonator. The feasibility of this method has been demonstrated with a ZnO/SiO2 composite resonator for different electrode thickness. The effect of mechanical propagation loss in both piezoelectric layer and substrate has also been studied.

journal_name

Ultrasonics

journal_title

Ultrasonics

authors

Zhang Y,Wang Z,Cheeke JD

doi

10.1016/s0041-624x(99)00172-9

subject

Has Abstract

pub_date

2000-03-01 00:00:00

pages

114-7

issue

1-8

eissn

0041-624X

issn

1874-9968

pii

S0041-624X(99)00172-9

journal_volume

38

pub_type

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