Abstract：
:The paper presents the characteristics of vertically polarized surface waves generated in silicon substrate by acoustic coupling of bulk waves excited in a periodically patterned ZnO film on silicon. The finite element simulations are performed on the proposed patterned-ZnO/Si structure and vertically polarized modes in silicon are found to be dominant in the frequency dependent analysis. The generated modes in silicon are concentrated near the surface within a wavelength depth and exhibit surface wave properties. Dispersion curves of phase velocity and coupling coefficient for the surface modes are reported. The results indicate high electromechanical coupling coefficient of 6.4% as well as high phase velocity of 5332 m/s for the surface mode generated in silicon owing to the acoustic coupling of the first order bulk mode in ZnO pattern observed at ZnO height to wavelength ratio of 0.19.
journal_name
Ultrasonicsjournal_title
Ultrasonicsauthors
Santosh GS,Nemade HBdoi
10.1016/j.ultras.2015.01.008subject
Has Abstractpub_date
2015-05-01 00:00:00pages
40-4eissn
0041-624Xissn
1874-9968pii
S0041-624X(15)00010-4journal_volume
59pub_type
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