Sensitivity improvement of a pump-probe set-up for thin film and microstructure metrology.

Abstract:

:This investigation deals with various new aspects of the sensitivity improvement of a pump-probe laser based acoustic method. A short laser pulse is used to excite a mechanical pulse thermo-elastically. Echoes of these mechanical pulses reaching the surface are causing a slight change of the optical reflectivity. The surface reflectivity is scanned versus time with a probe pulse. Thus the time of flight of the acoustic pulse is measured. The quantity to be measured i.e. the optical reflectivity change deltaR caused by acoustic pulses, is rather small. A set-up having an estimated sensitivity deltaR/R of about 10(-5) has shown to be sufficient to detect up to the fifth echo in a 50 nm aluminum film on sapphire substrate. A key challenge is the reduction of optical and electrical cross-talk between the excitation and the detection. Therefore the concepts of double-frequency modulation, cross-polarization, and balanced photodetection are implemented. Practical aspects like beam guiding, modulation techniques, beam focus minimization, and beam focus matching are discussed. Measurements for single- and multi-layer metallic films demanding higher sensitivity are presented.

journal_name

Ultrasonics

journal_title

Ultrasonics

authors

Vollmann J,Profunser DM,Dual J

doi

10.1016/s0041-624x(02)00207-x

subject

Has Abstract

pub_date

2002-05-01 00:00:00

pages

757-63

issue

1-8

eissn

0041-624X

issn

1874-9968

pii

S0041-624X(02)00207-X

journal_volume

40

pub_type

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