故障现象机器在曝光过程中突然出现错误,信息提示为:ER-121 GANTRY FAIL 00040000ER-114 SERVO ALARMAL-108 TABLE LIMITER-121 GANTRY FAIL 00040000即GANTRYREADY CAN NOT BE DONE FOR MORE THAN10SEC机架准备不能超过十分钟.原因是SYSTEM FAILURE错误来自TGP.