Pulse-Modulated Plasma Etching of Copper Thin Films via CH₃COOH/Ar.

Abstract:

:Pulse-modulated plasma etching of copper masked using SIO₂ films was conducted via a CH₃COOH/Ar. The etch characteristics were examined under pulse-modulated plasma. As the duty ratio of pulse decreased and the frequency of pulse increased, the etch selectivity and etch profile were improved. X-ray photoelectron spectroscopy and indicated that more copper oxides (Cu₂O and CuO) and Cu(CH₃COO)₂ were formed using pulse-modulated plasma than those formed using continuous-wave (CW) plasma. As the concentration of CH3COOH gas in pulse-modulated plasma increased, the formation of these copper compounds increased, which improved the etch profiles. Optical emission spectroscopy confirmed that the active ingredients of the plasma increased with decreasing pulse duty ratio and increasing frequency. Therefore, the optimized pulsed plasma etching of copper via a CH₃COOH/Ar gas provides better etch profile than that by CW plasma etching.

journal_name

J Nanosci Nanotechnol

authors

Ryu JS,Lim ET,Cha MH,Chung CW

doi

10.1166/jnn.2021.19462

subject

Has Abstract

pub_date

2021-11-01 00:00:00

pages

5628-5634

issue

11

eissn

1533-4880

issn

1533-4899

journal_volume

21

pub_type

杂志文章
  • Electrocaloric Effect of (K1-xNax)NbO₃ Single Crystal.

    abstract::The electrocaloric effect of (K1-xNa x )NbO₃ single crystal is calculated based on Landau-Devonshire theory. The electrocaloric coefficient and adiabatic temperature change are calculated with the variation of temperature in rhombohedral, orthorhombic and tetragonal phase. A...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19353

    authors: Jin M,Qiu J,Chen Z,Wang X,Yuan N,Ding J

    更新日期:2021-10-01 00:00:00

  • Simple Synthesis of Ru Decahedral Hollow Nanocages with Face-Centered Cubic Structure.

    abstract::Metallic nanocrystals with specific morphologies are of great interest to various applications, in particular for nanocages with well-defined and controllable surface due to high surface-to-volume ratio with high utilization efficiency of atoms. In the present work, Ru decahedral nanocages were synthesized via a combi...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19358

    authors: Zhou X,Qi W,Li Y

    更新日期:2021-10-01 00:00:00

  • In Situ Transformed Carbon Fibers/Al₂O₃ Nanocomposites Using Cao-MgO-SiO₂ Sintering Agent.

    abstract::In Situ transformed carbon fibers/Al₂O₃ ceramic matrix nanocomposites with Cao-MgO-SiO₂ sintering agent were prepared by hot-pressed sintering technology in vacuum. In the sintering process, pre-oxidized polyacrylonitrile fibers (below named as pre-oxidized PAN fibers) were used as the precursors of In Situ transforme...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19354

    authors: Chen HH,Cao JJ,Hong HP,Zheng N,Ren J,Wang CA

    更新日期:2021-10-01 00:00:00

  • Microwave Synthesis of Magnetite Nanoparticles and Mg-Doped Magnetite Nanoparticles by Precipitation of Fe2+ Ions.

    abstract::This study is focused on a simple and fast synthesis of nonstoichiometric magnetite nanoparticles with the chemical formula Fe3-XO₄ and magnesium ferrite nanoparticles (Mg1-XFe2+XO₄). The nanoparticles were prepared with Fe2+ ions (FeSO₄ · H₂O) alkalised by KOH under oxidative conditions and in a microwave field. X-ra...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19357

    authors: Ochmann M,Machala L,Kašlík J

    更新日期:2021-10-01 00:00:00

  • Oxidative Stress Induced Cytotoxicity of Colloidal Copper Nanoparticles on RAW 264.7 Macrophage Cell Line.

    abstract::Copper is an essential trace mineral that plays an important role in various physiological processes of human body and also possesses excellent antimicrobial properties, however its high dose results in the formation of free-radicals, which can induce cytotoxicity through chromosomal and DNA damage. Therefore, cytotox...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19365

    authors: Sharma P,Goyal D,Baranwal M,Chudasama B

    更新日期:2021-10-01 00:00:00

  • Preparation and Evaluation of Nanostructured Lipid Carrier for Topical Delivery of Velutin: Synthetic Tyrosinase Inhibitor.

    abstract::The purpose of this study is to produce nanostructured lipid carrier (NLC) that can solubilize poorly water-soluble velutin and verify an improved tyrosinase synthesis inhibition. A solubility test for velutin was conducted. Cetyl palmitate and caprylic/capric triglyceride were selected as solubilizer. The lipid matri...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19173

    authors: Cheon SH,Park SY,Sung JH,Lee JG,Choi SH,Jang JW,Kim HC,Kim ST,Jeong S,Lee K,Jang DJ

    更新日期:2021-07-01 00:00:00

  • Effect of Incorporating a Dimethacrylate Monomer on the Shear Bond Strength of Two Adhesive Resin Cements to Zirconia Ceramic.

    abstract::Self-assembled nano-layering resulting from interaction of the phosphate functional group of adhesive monomers with zirconia ceramic surface has been proposed. The purpose of this study was to investigate the bond strengths of two adhesive resin cements (Panavia F 2.0 and BisCem) containing phosphate monomers added wi...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19166

    authors: Lee MH,Kwon TY,Kim IH,Kim YK

    更新日期:2021-07-01 00:00:00

  • Synthesis and Blue Pixel Property of New Violet Dye for Image Sensors.

    abstract::In this study, a blue photoresist with the hybrid dye-pigment system was developed by mixing xanthene-based dye (XPDIA) and blue pigment 15:6 (1:1, 5 wt% of total mixture amount) in order to develop high-performance image sensors with high thermal and chemical stability. The colorant used in this study has the nano-si...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19236

    authors: Park S,Kang S,Kim H,Park S,Kwon H,Lee S,Park J

    更新日期:2021-07-01 00:00:00

  • Methanol Extract of Mongolian Iris bungei Maxim. Stimulates 3T3-L1 Adipocyte Differentiation.

    abstract::Iris bungei Maxim. (IB), which is native to China and Mongolia, is used as a traditional medicine for conditions such as inflammation, cancer, and bacterial infections. However, the effects of Iris bungei Maxim. on adipocyte differentiation have not been studied. In the present study, we first demonstrated the molecul...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19160

    authors: Yeon J,Suh SS,Youn UJ,Bazarragchaa B,Enebish G,Seo JB

    更新日期:2021-07-01 00:00:00

  • Sensing Characteristics of Improved Positive Temperature Coefficient Thermistors with Paint Forms.

    abstract::The disadvantage of using a typical temperature sensor is limited depending on the shape of the model to be measured. If the shape is curved, it is not easy to check the surface temperature. A smart paint for temperature measurement is proposed to overcome this disadvantage. Polymer solutions were prepared with a disp...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19211

    authors: Ahn JH,Lee CY

    更新日期:2021-07-01 00:00:00

  • Fabrication of Durable Ni-YSZ Hydrogen Electrode for High-Temperature Solid Electrolyzer Cells.

    abstract::Solid oxide electrolyzer cells with an Ni-Fe-yttria-stabilized zirconia (Ni-Fe-YSZ) hydrogen electrode as the cathode, lanthanum strontium ferrite (LSCF)-gadolinia-doped ceria (GDC) air electrode as the anode, and YSZ as the electrolyte were fabricated, and the oxidation protection effect of sacrificial Fe particles w...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19232

    authors: Lee MJ,Lee KJ,Shin JH,Hwang H

    更新日期:2021-07-01 00:00:00

  • Semitransparent Thin-Film Dual-Metal Anode for Red-Phosphorescent Organic Light-Emitting Diodes.

    abstract::Semitransparent dual-metal electrodes comprising several thin layers of metals, such as Ni, Ag, Cu, and Al, were developed for designing flexible red-phosphorescent organic light-emitting diodes (OLEDs). The said diodes were fabricated by first depositing a Ni layer on four glass and polyethylene terephthalate (PET) s...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19226

    authors: Zhang X,Lee HW,Lee H,Baang S,Park J

    更新日期:2021-07-01 00:00:00

  • Photocatalytic Reaction Properties of TiO₂-Supported on the Long Lasting Phosphor: Sr₄Al14O25:Eu2+,Dy3.

    abstract::The TiO₂/Sr4Al14O25:Eu2+,Dy3+ photocatalytic composite was prepared by depositing the nano-crystalline titanium dioxide layer on the long-lasting phosphor substrate of strontium aluminate, using a low-pressure chemical vapor deposition (LP-CVD). The photocatalysis characteristic was studied by examining the photodegra...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19207

    authors: Sung HJ,Jung SC,Kim JS

    更新日期:2021-07-01 00:00:00

  • Anti-Viral microRNAs Profiling in Infectious Salmon Anemia Virus (ISAV)-Infected Atlantic Salmon Kidney (ASK) Cells.

    abstract::Infectious salmon anemia virus (ISAV) is an orthomyxovirus causing fetal disease of farmed Atlantic salmon, leading to considerable financial losses farmers around the world. In the present study, we sequenced and identified microRNAs (miRNAs) from Atlantic salmon kidney (ASK) cells infected with ISAV. Based on initia...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19159

    authors: Suh SS

    更新日期:2021-07-01 00:00:00

  • Effect of Plating Layers on the Bonding Strength of p-Type Bi-Te Thermoelectric Elements.

    abstract::In thermoelectric modules, multiple n-type and p-type thermoelectric elements are electrically connected in series on a Cu electrode that is bonded to a ceramic substrate. Defects in the bond between the thermoelectric elements and the Cu electrode could impact the performance of the entire thermoelectric module. This...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19433

    authors: Yun SM,Son I,Bae SH

    更新日期:2021-08-01 00:00:00

  • Mechanical Properties of Epoxy Adhesive Under Thermal Aging and Their Chemical Degradation Behavior.

    abstract::Epoxy adhesive was analyzed under long term thermal aging and mechanical properties and chemical degradation were observed by X-ray photoelectron spectroscopy (XPS). Long term thermal exposure of epoxy causes a noticeable reduction in adhesive properties. We developed a predictive model of temperature and time depende...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19424

    authors: Chung B,Sungchul S,Shim J,Ryu S

    更新日期:2021-08-01 00:00:00

  • Copolymerization of Acrylic Monomers and Silane Group Containing Titanium Carbide Nanoparticles for Application to Ophthalmic Lens Materials.

    abstract::This research was conducted to synthesis and application for high oxygen permeable ophthalmic lens materials. 2-(Trimethylsiloxy)ethyl methacrylate (2T), 3-[Tris(trimethylsiloxy)silyl]propyl methacrylate (3T), [(1,1-Dimethyl-2-propynyl)oxy]trimethylsilane (TMS), Poly(ethylene glycol) methyl ether methacrylate (PEGMA),...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19432

    authors: Lee MJ,Sung AY

    更新日期:2021-08-01 00:00:00

  • Effect of Electrode Materials on the Electrical Characteristics of Amorphous Indium-Tin-Gallium-Zinc Oxide Thin-Film Transistors.

    abstract::In this study, we investigated the effect of electrode materials on the electrical characteristics of coplanar top-gate a-ITGZO thin-film transistors, in which the gate, source, and drain electrodes were made of the same metal, Ti or Al. The field-effect mobilities of the a-ITGZO thin-film transistors with Ti and Al e...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19397

    authors: Lee H,Cho K,Kim S

    更新日期:2021-08-01 00:00:00

  • The Effect of Grain Boundary on Electrical Characteristics in the Source and Drain Regions of Polycrystalline Silicon Based in One Transistor Dynamic Random Access Memory.

    abstract::In this paper, we present a capacitorless one transistor dynamic random access memory (1T-DRAM) based on a polycrystalline silicon (poly-Si) double gate MOSFET with grain boundaries (GBs). Several studies have been conducted to implement 1T-DRAM using poly-Si. This is because poly-Si has the advantage of low-cost fabr...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19396

    authors: An HD,Cho MS,Mun HJ,Lee SH,Park J,Jang J,Bae JH,Kang IM

    更新日期:2021-08-01 00:00:00

  • Optical Analysis of Hole Patterned Ag Nanoparticle Structure.

    abstract::A structure with periodic sub-wavelength nanohole patterns interacts with incident light and causes extraordinary optical transmission (EOT), with metal nanoparticles leading to localized surface plasmon resonance (LSPR) phenomena. To explore the effects of metal nanoparticles (NPs), optical analysis is performed for ...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19382

    authors: Jeon HJ,Kim JY,Choi J

    更新日期:2021-08-01 00:00:00

  • Characterizing Fluorescence Emissions of Hairpin DNA-Templated Silver Nanoclusters by cDNA Hybridization.

    abstract::Stem-loop hairpin DNA probes have high hybridization specificity and unique selectivity to target molecules such as DNA and small molecules. DNA-templated silver nanoclusters (DNA-AgNCs) has been widely used to detect biomolecules of interest due to the photostable, bright, and efficient methods. In this study, we mea...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19377

    authors: Kim S,Ha G,Gang J

    更新日期:2021-08-01 00:00:00

  • Synthesis and Characteristic Properties of Crosslinked Chitosan with Epichlorohydrin for Nitrate Removal from Water.

    abstract::In this study, we prepared chitosan beads cross-linked with epichlorohydrin (CB-ECH) to improve the removal of nitrate in groundwater. It was confirmed that CB-ECH exhibited higher thermal stability and well-developed nano-pores compared to the pure chitosan beads (CB) by the thermogravimetric analyzer, nitrogen gas a...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19271

    authors: Lee SJ,Hwang KJ,Youn Y,Kim SC,Yoon SD,Shim WG

    更新日期:2021-09-01 00:00:00

  • Brittle Fracture Avoidance Technology in Large Structures with Thick Steel Plates.

    abstract::The 460-MPa-class steel was developed by thermomechanical control process for shipbuilding, and the maximum plate thickness was 100 mm, which has the fine grain size as 5-20 µm. The surfaces were studied in terms of micro and nano structures, surface roughness, and surface energy to evaluate the effect of fracture tou...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19252

    authors: An G,Park J,Bae H

    更新日期:2021-09-01 00:00:00

  • Microstructures and Mechanical Properties of Solid-State Welded Steels.

    abstract::This study aimed to evaluate the soundness of solid-state welded steels. STS 430F alloy with a rod type was selected as experimental material, and the friction welding was conducted at a rotation speed of 2,000 RPM and upset length of 3 mm. The application of friction welding on STS 430F rods led to significant grain ...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19254

    authors: Kim GW,Jeong SM

    更新日期:2021-09-01 00:00:00

  • Development of Near Gold-Colored TixZr1-xN Nano Thin Films by Arc Ion Plating.

    abstract::A gold plating technique with wet chemical solution is widely used to make different metallic colors for various industrial applications. However, it results in environmental pollution due to the generation of contaminated water, and it is also an expensive process. As an alternative approach, it is often desirable to...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19261

    authors: Jeong WJ

    更新日期:2021-09-01 00:00:00

  • Influence of Glow-Discharge Nitrided Temperatures of Cast Stainless Steel for Cavitation-Erosion Enhancement in Seawater.

    abstract::In this work, corrosion resistance and cavitation-erosion characteristics were investigated by applying plasma ion nitriding technique to cast stainless steels used as materials of high speed rotors under seawater environment. Plasma ion nitriding was performed for 10 h at various temperature parameters with 25% N₂ an...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19250

    authors: Chong SO,Kim SJ

    更新日期:2021-09-01 00:00:00

  • Synthesis and Physical Properties of New Violet Color Filter Dye for Image Sensors.

    abstract::New violet colorant, XPDIA was synthesized by using Acid Red 52 to develop a high-performance image sensor. Solubility of XPDIA was more than 5 wt% in PGMEA which is the main solvent in the color filter preparation process. △Eab value of XPDIA showed a very low color difference of 2.17 after thermal treatment. In solv...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19301

    authors: Kim H,Park J

    更新日期:2021-09-01 00:00:00

  • A Study on Formation of Aluminum-Doped Zinc Oxide Films by Pulsed-Direct Current Sputtering for CIGS Solar Cells.

    abstract::Considering the relationship between thin film thickness of transparent conductive oxide (TCO) materials and the reversed pulse time in pulsed-direct current (DC) sputtering, aluminum-doped zinc oxide (AZO) films were deposited on glass substrates at different reversed pulse times by changing oxygen/argon (O₂/Ar) gas ...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19298

    authors: Zhao Z,Ryu H,Lee H,Kwon SJ,Cho ES

    更新日期:2021-09-01 00:00:00

  • Influence of Temperature on Graphene/ZnO Heterojunction Schottky Diode Characteristics.

    abstract::The paper reports development of graphene/ZnO heterojunction Schottky diode structure and its structural and electrical characterization. Graphene is grown on copper substrate using chemical vapor deposition (CVD) and transferred on flexible substrate (indium Tin Oxide coated PET). The grown thin layer is characterize...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19084

    authors: Kumar A,Varghese A,Yadav S,Prasad M,Janyani V,Yadav RP

    更新日期:2021-05-01 00:00:00

  • Transparent Triboelectric Nanogenerator Based on Thermoplastic Polyurethane Films.

    abstract::This study aims at investigating flexible and transparent thermoplastic polyurethane (TPU) as a novel material for triboelectric nanogenerator (TENG) devices with a polyethylene terephthalate layer. Devices having TPU-either as a flat film or as electrospun micrometer-dimension fibers with varying concentrations of TP...

    journal_title:Journal of nanoscience and nanotechnology

    pub_type: 杂志文章

    doi:10.1166/jnn.2021.19143

    authors: Srither SR,Dhineshbabu NR,Shankar Rao DS,Krishna Prasad S,Dahlsten O,Bose S

    更新日期:2021-05-01 00:00:00