Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias.

Abstract:

:We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ± 16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

journal_name

J Biomed Opt

authors

Liu L,Wu L,Sun J,Lin E,Xie H

doi

10.1117/1.3533323

subject

Has Abstract

pub_date

2011-02-01 00:00:00

pages

026006

issue

2

eissn

1083-3668

issn

1560-2281

journal_volume

16

pub_type

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