Abstract：
:Aluminium nitride (AlN) is a promising semiconductor material for use as a substrate in high-power, high-frequency electronic and deep-ultraviolet optoelectronic devices. We study the feasibility of a novel AlN fabrication technique by using the Al/GaN substitution reaction method. The substitution method we propose here consists of an Al deposition process on a GaN substrate by a sputtering technique and heat treatment process. The substitution reaction (Al + GaN = AlN + Ga) is proceeded by heat treatment of the Al/GaN sample, which provides a low temperature, simple and easy process. C-axis-oriented AlN layers are formed at the Al/GaN interface after heat treatment of the Al/GaN samples at some conditions of 1473-1573 K for 0-3 h. A longer holding time leads to an increase in the thickness of the AlN layer. The growth rate of the AlN layer is controlled by the interdiffusion in the AlN layer.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Noorprajuda M,Ohtsuka M,Adachi M,Fukuyama Hdoi
10.1038/s41598-020-69992-ysubject
Has Abstractpub_date
2020-08-03 00:00:00pages
13058issue
1issn
2045-2322pii
10.1038/s41598-020-69992-yjournal_volume
10pub_type
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