Nanofabrication for all-soft and high-density electronic devices based on liquid metal.

Abstract:

:Innovations in soft material synthesis and fabrication technologies have led to the development of integrated soft electronic devices. Such soft devices offer opportunities to interact with biological cells, mimicking their soft environment. However, existing fabrication technologies cannot create the submicron-scale, soft transducers needed for healthcare and medical applications involving single cells. This work presents a nanofabrication strategy to create submicron-scale, all-soft electronic devices based on eutectic gallium-indium alloy (EGaIn) using a hybrid method utilizing electron-beam lithography and soft lithography. The hybrid lithography process is applied to a biphasic structure, comprising a metallic adhesion layer coated with EGaIn, to create soft nano/microstructures embedded in elastomeric materials. Submicron-scale EGaIn thin-film patterning with feature sizes as small as 180 nm and 1 μm line spacing was achieved, resulting in the highest resolution EGaIn patterning technique to date. The resulting soft and stretchable EGaIn patterns offer a currently unrivaled combination of resolution, electrical conductivity, and electronic/wiring density.

journal_name

Nat Commun

journal_title

Nature communications

authors

Kim MG,Brown DK,Brand O

doi

10.1038/s41467-020-14814-y

subject

Has Abstract

pub_date

2020-02-21 00:00:00

pages

1002

issue

1

issn

2041-1723

pii

10.1038/s41467-020-14814-y

journal_volume

11

pub_type

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