Abstract：
:This paper presented a conformal smoothing theory, and smoothing capability evaluation was established on the proposed theory. According to pressure distribution model, processing parameters have been optimized and the CPP sample with a size of 340 × 340 mm was applied in conformal smoothing. The middle spatial frequency was effectively corrected with the total polishing time of 750 min, and energy was constringed 32.2 times (improved from 57.68 nm2·mm to 1.79 nm2·mm). Meanwhile, surface roughness RMS (root mean square) maintained at the same scale (changed from 265.4 nm to 265.2 nm). Parametric conformal smoothing was proven to be an effective method to control the middle spatial frequency error of CPPs.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Song C,Zhang W,Shi F,Lin Z,Nie Xdoi
10.1038/s41598-020-59484-4subject
Has Abstractpub_date
2020-02-13 00:00:00pages
2579issue
1issn
2045-2322pii
10.1038/s41598-020-59484-4journal_volume
10pub_type
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