Conformal smoothing of mid-spatial frequency surface error for nano-accuracy Continuous Phase Plates (CPP).

Abstract:

:This paper presented a conformal smoothing theory, and smoothing capability evaluation was established on the proposed theory. According to pressure distribution model, processing parameters have been optimized and the CPP sample with a size of 340 × 340 mm was applied in conformal smoothing. The middle spatial frequency was effectively corrected with the total polishing time of 750 min, and energy was constringed 32.2 times (improved from 57.68 nm2·mm to 1.79 nm2·mm). Meanwhile, surface roughness RMS (root mean square) maintained at the same scale (changed from 265.4 nm to 265.2 nm). Parametric conformal smoothing was proven to be an effective method to control the middle spatial frequency error of CPPs.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Song C,Zhang W,Shi F,Lin Z,Nie X

doi

10.1038/s41598-020-59484-4

subject

Has Abstract

pub_date

2020-02-13 00:00:00

pages

2579

issue

1

issn

2045-2322

pii

10.1038/s41598-020-59484-4

journal_volume

10

pub_type

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