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Vapor-liquid-solid growth of large-area multilayer hexagonal boron nitride on dielectric substrates.

Abstract：

:Multilayer hexagonal boron nitride (h-BN) is highly desirable as a dielectric substrate for the fabrication of two-dimensional (2D) electronic and optoelectronic devices. However, the controllable synthesis of multilayer h-BN in large areas is still limited in terms of crystallinity, thickness and stacking order. Here, we report a vapor-liquid-solid growth (VLSG) method to achieve uniform multilayer h-BN by using a molten Fe82B18 alloy and N2 as reactants. Liquid Fe82B18 not only supplies boron but also continuously dissociates nitrogen atoms from the N2 vapor to support direct h-BN growth on a sapphire substrate; therefore, the VLSG method delivers high-quality h-BN multilayers with a controllable thickness. Further investigation of the phase evolution of the Fe-B-N system reveals that isothermal segregation dominates the growth of the h-BN. The approach herein demonstrates the feasibility for large-area fabrication of van der Waals 2D materials and heterostructures.

journal_name

Nat Commun

journal_title

Nature communications

authors

Shi Z,Wang X,Li Q,Yang P,Lu G,Jiang R,Wang H,Zhang C,Cong C,Liu Z,Wu T,Wang H,Yu Q,Xie X

doi

10.1038/s41467-020-14596-3

subject

Has Abstract

pub_date

2020-02-12 00:00:00

pages

849

issue

1

issn

2041-1723

pii

10.1038/s41467-020-14596-3

journal_volume

11

pub_type

杂志文章

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