Determination of the concentration of impurities in GaN from photoluminescence and secondary-ion mass spectrometry.

Abstract:

:Photoluminescence (PL) was used to estimate the concentration of carbon in GaN grown by hydride vapor phase epitaxy (HVPE). The PL data were compared with profiles of the impurities obtained from secondary ion mass spectrometry (SIMS) measurements. Comparison of PL and SIMS data has revealed that apparently high concentrations of C and O at depths up to 1 µm in SIMS profiles do not represent depth distributions of these species in the GaN matrix but are rather caused by post-growth surface contamination and knocking-in impurity species from the surface. In particular, PL analysis supplemented by reactive ion etching up to the depth of 400 nm indicates that the concentration of carbon in nitrogen sites is below 2-5 × 1015 cm-3 at any depth of GaN samples grown by HVPE. We demonstrate that PL is a very sensitive and reliable tool to determine the concentrations of impurities in the GaN matrix.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Reshchikov MA,Vorobiov M,Andrieiev O,Ding K,Izyumskaya N,Avrutin V,Usikov A,Helava H,Makarov Y

doi

10.1038/s41598-020-59033-z

subject

Has Abstract

pub_date

2020-02-10 00:00:00

pages

2223

issue

1

issn

2045-2322

pii

10.1038/s41598-020-59033-z

journal_volume

10

pub_type

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