Abstract：
:In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Rougieux FE,Kwapil W,Heinz F,Siriwardhana M,Schubert MCdoi
10.1038/s41598-019-49804-8subject
Has Abstractpub_date
2019-10-03 00:00:00pages
14268issue
1issn
2045-2322pii
10.1038/s41598-019-49804-8journal_volume
9pub_type
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