Abstract:
:We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Liu S,Wang Y,Liao C,Wang Y,He J,Fu C,Yang K,Bai Z,Zhang Fdoi
10.1038/s41598-017-00931-0subject
Has Abstractpub_date
2017-04-11 00:00:00pages
787issue
1issn
2045-2322pii
10.1038/s41598-017-00931-0journal_volume
7pub_type
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