Growth of epitaxial silicon nanowires on a Si substrate by a metal-catalyst-free process.

Abstract:

:The growth of epitaxial Si nanowires by a metal-catalyst-free process has been investigated as an alternative to the more common metal-catalyzed vapor-liquid-solid process. The well-aligned Si nanowires are successfully grown on a (111)-oriented Si substrate without any metal catalysts by a thermal treatment using silicon sulfide as a Si source at approximately 1200 °C. The needle-shaped Si nanowires, which have a core-shell structure that consists of a single-crystalline Si core along the <111> direction consistent with the substrate direction and a surface coating of silicon oxide, are grown by a metal-catalyst-free process. In this process, the silicon sulfide in the liquid phase facilitates the nucleation and nanowire growth. In contrast, oxygen-rich nanowires that consist of crystalline Si at the tip and lumpy silicon oxide on the body are observed in a sample grown at 1300 °C, which disturbs the epitaxial growth of Si nanowires.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Ishiyama T,Nakagawa S,Wakamatsu T

doi

10.1038/srep30608

subject

Has Abstract

pub_date

2016-07-28 00:00:00

pages

30608

issn

2045-2322

pii

srep30608

journal_volume

6

pub_type

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