Cross-stacked carbon nanotubes assisted self-separation of free-standing GaN substrates by hydride vapor phase epitaxy.

Abstract:

:We report a novel method to fabricate high quality 2-inch freestanding GaN substrate grown on cross-stacked carbon nanotubes (CSCNTs) coated sapphire by hydride vapor phase epitaxy (HVPE). As nanoscale masks, these CSCNTs can help weaken the interface connection and release the compressive stress by forming voids during fast coalescence and also block the propagation of threading dislocations (TDs). During the cool-down process, thermal stress-induced cracks are initiated at the CSCNTs interface with the help of air voids and propagated all over the films which leads to full self-separation of FS-GaN substrate. Raman and photoluminescence spectra further reveal the stress relief and crystalline improvement of GaN with CSCNTs. It is expected that the efficient, low cost and mass-producible technique may enable new applications for CNTs in nitride optoelectronic fields.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Wei T,Yang J,Wei Y,Huo Z,Ji X,Zhang Y,Wang J,Li J,Fan S

doi

10.1038/srep28620

subject

Has Abstract

pub_date

2016-06-24 00:00:00

pages

28620

issn

2045-2322

pii

srep28620

journal_volume

6

pub_type

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