Abstract：
:High mobility channel thin-film-transistor (TFT) is crucial for both display and future generation integrated circuit. We report a new metal-oxide TFT that has an ultra-thin 4.5 nm SnO2 thickness for both active channel and source-drain regions, very high 147 cm(2)/Vs field-effect mobility, high ION/IOFF of 2.3 × 10(7), small 110 mV/dec sub-threshold slope, and a low VD of 2.5 V for low power operation. This mobility is already better than chemical-vapor-deposition grown multi-layers MoS2 TFT. From first principle quantum-mechanical calculation, the high mobility TFT is due to strongly overlapped orbitals.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Shih CW,Chin A,Lu CF,Su WFdoi
10.1038/srep19023subject
Has Abstractpub_date
2016-01-08 00:00:00pages
19023issn
2045-2322pii
srep19023journal_volume
6pub_type
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