Synthesis of large-area multilayer hexagonal boron nitride for high material performance.

Abstract:

:Although hexagonal boron nitride (h-BN) is a good candidate for gate-insulating materials by minimizing interaction from substrate, further applications to electronic devices with available two-dimensional semiconductors continue to be limited by flake size. While monolayer h-BN has been synthesized on Pt and Cu foil using chemical vapour deposition (CVD), multilayer h-BN is still absent. Here we use Fe foil and synthesize large-area multilayer h-BN film by CVD with a borazine precursor. These films reveal strong cathodoluminescence and high mechanical strength (Young's modulus: 1.16 ± 0.1 TPa), reminiscent of formation of high-quality h-BN. The CVD-grown graphene on multilayer h-BN film yields a high carrier mobility of ∼ 24,000 cm(2) V(-1) s(-1) at room temperature, higher than that (∼ 13,000 (2) V(-1) s(-1)) with exfoliated h-BN. By placing additional h-BN on a SiO2/Si substrate for a MoS2 (WSe2) field-effect transistor, the doping effect from gate oxide is minimized and furthermore the mobility is improved by four (150) times.

journal_name

Nat Commun

journal_title

Nature communications

authors

Kim SM,Hsu A,Park MH,Chae SH,Yun SJ,Lee JS,Cho DH,Fang W,Lee C,Palacios T,Dresselhaus M,Kim KK,Lee YH,Kong J

doi

10.1038/ncomms9662

subject

Has Abstract

pub_date

2015-10-28 00:00:00

pages

8662

issn

2041-1723

pii

ncomms9662

journal_volume

6

pub_type

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