Abstract:
:A major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based on re-usable silicon membrane hard masks, patterned using standard lithography and mature silicon processing technology. These masks, transferred precisely onto targeted regions, can be in the millimetre scale. They allow for fabrication on a wide range of substrates, including rough, soft, and non-conductive materials, enabling feature linewidths down to 10 nm. Plasma etching, lift-off, and ion implantation are realized without the need for scanning electron/ion beam processing, UV exposure, or wet etching on target substrates.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Li L,Bayn I,Lu M,Nam CY,Schröder T,Stein A,Harris NC,Englund Ddoi
10.1038/srep07802subject
Has Abstractpub_date
2015-01-15 00:00:00pages
7802issn
2045-2322pii
srep07802journal_volume
5pub_type
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