Abstract:
:Automatic release and vertical transferring of silicon/silicon oxide nanowire arrays with a high integrity are demonstrated by an Ag-assisted ammonia etching method. By adding a water steaming step between Ag-assisted HF/H2O2 and ammonia etching to form a SiOx protective layer sheathing Si nanowires, we can tune the composition of the nanowires from SiOx (0 ≤ x ≤ 2) to Si nanowires. Ag plays a key role to the neat and uniform release of Si/SiOx nanowire arrays from Si wafer in the ammonia etching process. The vertical Si nanowire array device, with both sides having high-quality Ohmic contact, can be transferred to arbitrary substrates, especially on a flexible substrate. The method developed here offers a facile method to realize flexible Si nanowire array functional devices.
journal_name
Sci Repjournal_title
Scientific reportsauthors
Wu L,Li S,He W,Teng D,Wang K,Ye Cdoi
10.1038/srep03940subject
Has Abstractpub_date
2014-02-03 00:00:00pages
3940issn
2045-2322pii
srep03940journal_volume
4pub_type
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