Origin of the improved mobility and photo-bias stability in a double-channel metal oxide transistor.

Abstract:

:This study examined the performance and photo-bias stability of double-channel ZnSnO/InZnO (ZTO/IZO) thin-film transistors. The field-effect mobility (μFE) and photo-bias stability of the double-channel device were improved by increasing the thickness of the front IZO film (t(int)) compared to the single-ZTO-channel device. A high-mobility (approximately 32.3 cm(2)/Vs) ZTO/IZO transistor with excellent photo-bias stability was obtained from Sn doping of the front IZO layer. First-principles calculations revealed an increase in the formation energy of O vacancy defects in the Sn-doped IZO layer compared to the IZO layer. This observation suggests that the superior photo-bias stability of the double-channel device is due to the effect of Sn doping during thermal annealing. However, these improvements were observed only when t(int) was less than the critical thickness. The rationale for this observation is also discussed based on the oxygen vacancy defect model.

journal_name

Sci Rep

journal_title

Scientific reports

authors

Jung HY,Kang Y,Hwang AY,Lee CK,Han S,Kim DH,Bae JU,Shin WS,Jeong JK

doi

10.1038/srep03765

subject

Has Abstract

pub_date

2014-01-20 00:00:00

pages

3765

issn

2045-2322

pii

srep03765

journal_volume

4

pub_type

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