Nanoanalysis by a high-resolution energy filtering transmission electron microscope.

Abstract:

:An energy-filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al(11)O(3)N(9), it was shown that the actual resolution attained is up to 0.5 nm. Surface plasmon loss images of silver particles were taken with a resolution of better than 0.4 nm. Furthermore, the sensitivity is sufficiently high to distinguish indium content differences of 2.5 atomic percent in In(x)Al(1-x)As. This performance is good enough to analyze elemental distribution with atomic-level resolution. Furthermore, since analysis with the energy-filtering microscope is easy and practical, nanoanalysis may come into wide use not only in academic fields but also in industry.

journal_name

Microsc Res Tech

authors

Mitome M,Bando Y,Golberg D,Kurashima K,Okura Y,Kaneyama T,Naruse M,Honda Y

doi

10.1002/jemt.20025

keywords:

subject

Has Abstract

pub_date

2004-02-15 00:00:00

pages

140-8

issue

3

eissn

1059-910X

issn

1097-0029

journal_volume

63

pub_type

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