Abstract:
:An energy-filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al(11)O(3)N(9), it was shown that the actual resolution attained is up to 0.5 nm. Surface plasmon loss images of silver particles were taken with a resolution of better than 0.4 nm. Furthermore, the sensitivity is sufficiently high to distinguish indium content differences of 2.5 atomic percent in In(x)Al(1-x)As. This performance is good enough to analyze elemental distribution with atomic-level resolution. Furthermore, since analysis with the energy-filtering microscope is easy and practical, nanoanalysis may come into wide use not only in academic fields but also in industry.
journal_name
Microsc Res Techjournal_title
Microscopy research and techniqueauthors
Mitome M,Bando Y,Golberg D,Kurashima K,Okura Y,Kaneyama T,Naruse M,Honda Ydoi
10.1002/jemt.20025keywords:
subject
Has Abstractpub_date
2004-02-15 00:00:00pages
140-8issue
3eissn
1059-910Xissn
1097-0029journal_volume
63pub_type
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